HomeFACILITY Film Preparation E-Beam Evaporation System Pulsed Laser Deposition Magnetron Sputtering Magnetron Sputtering Characterization Low temperature photoelectric scanning platform(4T~RK) probe station Piezoelectric test platform(d33,d31)) Oxford magnet Comprehensive physical property test system Nanofabrication lithography machine 2-D transfer station Sample treatment box-type furnace tube furnace polisher cutterbar