Film Preparation

E-Beam Evaporation System
Pulsed Laser Deposition
PVD
Magnetron Sputtering
Magnetron Sputtering

Characterization

Low temperature photoelectric scanning platform(4T~RK)
probe station
Piezoelectric test platform(d33,d31))
Oxford magnet
Comprehensive physical property test system

Nanofabrication

lithography machine
2-D transfer station

Sample treatment

box-type furnace
tube furnace
polisher
cutterbar
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